Patent Assignment Details
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| Reel/Frame: | 012082/0795 | |
| Pages: | 4 |
| | Recorded: | 08/07/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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01/06/2004
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Application #:
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09924071
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Filing Dt:
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08/07/2001
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Publication #:
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Pub Dt:
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04/03/2003
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Title:
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INTERFEROMETER SYSTEM FOR A SEMICONDUCTOR EXPOSURE SYSTEM
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Assignee
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| CHIYODA-KU |
| 2-3 MARUNOUCHI, 3-CHOME, |
| TOKYO 100-8331, JAPAN |
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Correspondence name and address
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PENNIE & EDMONDS LLP
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THOMAS D. KOHLER
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1155 AVENUE OF THE AMERICAS
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NEW YORK, NEW YORK 10036
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