Patent Assignment Details
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| Reel/Frame: | 012183/0465 | |
| Pages: | 3 |
| | Recorded: | 09/12/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/29/2004
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Application #:
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09950748
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Filing Dt:
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09/12/2001
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Publication #:
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Pub Dt:
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03/14/2002
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Title:
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PROCESSING APPARATUS HAVING PARTICLE COUNTER AND CLEANING DEVICE, CLEANING METHOD, CLEANLINESS DIAGNOSIS METHOD AND SEMICONDUCTOR FABRICATING APPARATUS USING THE SAME
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Assignee
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| 7-1, SHIBA 5-CHOME |
| MINATO-KU TOKYO, JAPAN |
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Correspondence name and address
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ROSENMAN & COLIN LLP
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SAMSON HELFGOTT
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575 MADISON AVENUE
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NEW YORK, NY 10022-2585
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