Patent Assignment Details
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| Reel/Frame: | 012347/0960 | |
| Pages: | 3 |
| | Recorded: | 12/05/2001 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/28/2003
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Application #:
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09963382
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Filing Dt:
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09/27/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Title:
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METHOD AND APPARATUS FOR PROCESSING SUBSTRATES AND METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
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Assignee
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| 14-20, 3-CHOME |
| HIGASHI-NAKANO |
| NAKANO-KU, TOKYO 164-8511, JAPAN |
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Correspondence name and address
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BACON & THOMAS, PLLC
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EUGENE MAR
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625 SLATERS LANE FOURTH FLOOR
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ALEXANDRIA, VA 22314
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