Patent Assignment Details
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| Reel/Frame: | 012877/0904 | |
| Pages: | 4 |
| | Recorded: | 05/03/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/05/2004
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Application #:
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10138864
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Filing Dt:
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05/03/2002
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Publication #:
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Pub Dt:
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03/27/2003
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Title:
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POST EXPOSURE MODIFICATION OF CRITICAL DIMENSIONS IN MASK FABRICATION
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Assignees
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| 2200 MISSION COLLEGE BOULEVARD |
| SANTA CLARA, CALIFORNIA 95052 |
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| 1-1, ICHIGAYA-KAGACHO 1-CHOME |
| SHINJUKU-KU, TOKYO, JAPAN 162-8 |
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| 110-1 SHIMOASAO, KAWASAKI |
| ASAO-KU, KANAGAWA, JAPAN 215-0 |
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Correspondence name and address
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BLAKELY, SOKOLOFF, TAYLOR & ZAFMAN LLP
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BRENT E. VECCHIA
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12400 WILSHIRE BOULEVARD
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7TH FLOOR
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LOS ANGELES, CA 90025
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