Patent Assignment Details
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| Reel/Frame: | 012943/0939 | |
| Pages: | 17 |
| | Recorded: | 05/31/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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08/17/2004
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Application #:
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10075967
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Filing Dt:
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02/14/2002
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Title:
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YTTRIUM OXIDE BASED SURFACE COATING FOR SEMICONDCTOR IC PROCESSING VACUUM CHAMBERS
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Assignee
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| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CALIFORNIA 95052 |
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Correspondence name and address
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APPLIED MATERIAL, INC
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PATENT COUNSEL, M/S 2061
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P.O. BOX 450-A
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SANTA CLARA, CA 95052
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