Patent Assignment Details
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| Reel/Frame: | 013003/0674 | |
| Pages: | 4 |
| | Recorded: | 06/14/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/02/2003
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Application #:
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10077337
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Filing Dt:
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02/15/2002
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Publication #:
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Pub Dt:
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10/17/2002
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Title:
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MICROLITHOGRAPHIC EXPOSURE METHODS USING A SEGMENTED RETICLE DEFINING PATTERN ELEMENTS EXHIBITING REDUCED INCIDENCE OF STITCHING ANOMALIES WHEN IMAGED ON A SUBSTRATE
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Assignee
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| MARUNOUCHI 3-CHOME |
| FUJI BUILDING 2-3 |
| CHIYODA-KU, TOKYO 100, JAPAN |
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Correspondence name and address
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KLARQUIST SPARKMAN LLP
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DONALD L. STEPHENS JR.
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121 S.W. SALMON STREET
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ONE WORLD TRADE CENTER, SUITE 1600
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PORTLAND, OR 97204-2988
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