Patent Assignment Details
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| Reel/Frame: | 013092/0085 | |
| Pages: | 2 |
| | Recorded: | 04/24/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/01/2005
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Application #:
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10111500
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Filing Dt:
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04/24/2002
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Publication #:
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Pub Dt:
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10/24/2002
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Title:
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Method for inspecting silicon wafer,method for manufacturing silicon wafer, method for fabricating semiconductor device, and silicon wafer
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Assignee
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| CHIYODA-KU |
| 4-2, MARUNOUCHI 1-CHOME |
| TOKYO, JAPAN |
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Correspondence name and address
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RADER, FISHMAN & GRAUER, PLLC
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DAVID K. BENSON
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1233 20TH STREET, N.W.
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SUITE 501
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WASHINGTON, D.C. 20036
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