Patent Assignment Details
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| Reel/Frame: | 013102/0679 | |
| Pages: | 2 |
| | Recorded: | 07/15/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10195064
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Filing Dt:
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07/15/2002
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Publication #:
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Pub Dt:
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02/20/2003
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Title:
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Back-surface cleaning method for cleaning the back surface of a silicon wafer
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Assignee
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| 7-1, SHIBA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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YOUNG & THOMPSON
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BENOIT CASTEL
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SECOND FLOOR
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745 SOUTH 23RD STREET
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ARLINGTON, VA 22202
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