Patent Assignment Details
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| Reel/Frame: | 013139/0715 | |
| Pages: | 2 |
| | Recorded: | 07/18/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/22/2004
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Application #:
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10200469
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Filing Dt:
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07/18/2002
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Title:
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PROCESS AND APPARATUS FOR WAFER EDGE PROFILE CONTROL USING GAS FLOW CONTROL RING
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Assignee
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| 1551 MCCARTHY BOULEVARD |
| MILIPTAS, CALIFORNIA 95035 |
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Correspondence name and address
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LSI LOGIC CORPORATION
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TIMOTHY CROLL
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1551 MCCARTHY BOULEVARD
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M/S D-106
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MILIPTAS, CALIFORNIA 95035
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