Patent Assignment Details
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Reel/Frame: | 013469/0424 | |
| Pages: | 3 |
| | Recorded: | 09/24/2002 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10239657
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Filing Dt:
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09/24/2002
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Publication #:
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Pub Dt:
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02/12/2004
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Title:
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Photomask unit, photomask device, projection exposure device, projection exposure method and semiconductor device
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Assignees
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16-1, ONOGAWA, TSUKUBA-SHI |
IBARAKI 305-0053, JAPAN |
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2-5, KASUMIGASEKI 3-CHOME |
CHIYODA-KU, TOKYO 100-0013, JAPAN |
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Correspondence name and address
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FOLEY & LARDNER
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WILLIAM T. ELLIS
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WASHINGTON HARBOUR
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3000 K STREET, N.W., SUITE 500
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WASHINGTON, D.C. 20007-5143
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