Patent Assignment Details
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| Reel/Frame: | 013507/0782 | |
| Pages: | 7 |
| | Recorded: | 11/20/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/04/2004
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Application #:
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10259256
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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METHOD OF DRY ETCHING A SEMICONDUCTOR DEVICE IN THE ABSENCE OF A PLASMA
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Assignee
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| 555 UNION BOULEVARD |
| ALLENTOWN, PENNSYLVANIA 18109 |
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Correspondence name and address
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BEUSSE BROWNLEE BOWDOIN, ET AL.
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ROBERT L. WOLTER, ESQUIRE
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390 N. ORANGE AVENUE
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SUITE 2500
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ORLANDO, FL 32801
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