Patent Assignment Details
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| Reel/Frame: | 013598/0181 | |
| Pages: | 5 |
| | Recorded: | 12/26/2002 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/26/2005
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Application #:
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10255668
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Filing Dt:
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09/27/2002
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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SPECIFYING METHOD FOR CU CONTAMINATION PROCESSES AND DETECTING METHOD FOR CU CONTAMINATION DURING RECLAMATION OF SILICON WAFERS, AND RECLAMATION METHOD OF SILICON WAFERS
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Assignees
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| 10-26, WAKINOHAMA-CHO 2-CHOME, CHUO-KU |
| KOBE-SHI, HYOGO 651-8585, JAPAN |
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| 1510 ZEPHYR AVE |
| HAYWARD, CALIFORNIA 94544 |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL
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J. DEREK MASON, PH.D.
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1940 DUKE STREET
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ALEXANDRIA, VIRGINIA 22314
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