Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 013751/0129 | |
| Pages: | 3 |
| | Recorded: | 02/11/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
10
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Patent #:
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Issue Dt:
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10/02/1990
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Application #:
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07250745
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Filing Dt:
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09/29/1988
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Title:
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THIN FILM FORMING APPARATUS
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Patent #:
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Issue Dt:
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05/28/1991
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Application #:
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07364585
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Filing Dt:
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06/12/1989
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Title:
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PLASMA APPARATUS
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Patent #:
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Issue Dt:
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05/21/1991
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Application #:
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07414511
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Filing Dt:
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09/29/1989
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Title:
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PLASMA APPARATUS
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Patent #:
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Issue Dt:
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03/22/1994
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Application #:
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07779497
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Filing Dt:
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10/24/1991
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Title:
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METHOD FOR FORMING A THIN FILM FOR A SEMICONDUCTOR DEVICE
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Patent #:
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Issue Dt:
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04/16/1996
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Application #:
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08305732
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Filing Dt:
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09/14/1994
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Title:
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METHOD FOR FORMING A THIN FILM
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Patent #:
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Issue Dt:
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05/19/1998
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Application #:
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08486260
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Filing Dt:
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06/07/1995
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Title:
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A METHOD FOR FORMING A THIN FILM OF A SILICON OXIDE ON A SILICON SUBSTRATE BY BCR PLASMA
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Patent #:
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Issue Dt:
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07/08/1997
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Application #:
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08546342
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Filing Dt:
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10/20/1995
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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09/29/1998
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Application #:
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08575864
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Filing Dt:
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12/20/1995
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Title:
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ELECTROSTATIC CHUCK AND THE METHOD OF OPERATING THE SAME
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Patent #:
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Issue Dt:
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08/04/1998
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Application #:
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08605216
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Filing Dt:
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05/31/1996
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Title:
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PLASMA PROCESSING APPARATUS
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Patent #:
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Issue Dt:
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01/06/1998
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Application #:
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08636352
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Filing Dt:
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04/23/1996
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Title:
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PLASMA PROCESSING APPARATUS
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Assignee
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| 3-6, AKASAKA 5-CHOME MINATO-KU, |
| TOKYO,, JAPAN |
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Correspondence name and address
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SUGHRUE MION, PLLC
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STE. 800
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2100 PA. AVE
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WASH DC 20037
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