Patent Assignment Details
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| Reel/Frame: | 013783/0228 | |
| Pages: | 3 |
| | Recorded: | 02/25/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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11/22/2005
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Application #:
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10287522
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Filing Dt:
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11/05/2002
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Publication #:
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Pub Dt:
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06/26/2003
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Title:
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METHOD FOR INSPECTING EXPOSURE APPARATUS, EXPOSURE METHOD FOR CORRECTING FOCAL POINT, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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Assignee
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| 1-1 SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN HENDERSON FARABOW, ET AL.
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RICHARD V. BURGUJIAN
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1300 I STREET, N.W.
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WASHINGTON, DC 20005-3315
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