Patent Assignment Details
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| Reel/Frame: | 013898/0583 | |
| Pages: | 5 |
| | Recorded: | 04/01/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10338771
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Filing Dt:
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01/08/2003
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Publication #:
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Pub Dt:
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07/08/2004
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Title:
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Cooled deposition baffle in high density plasma semiconductor processing
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Assignee
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| TBS BROADCAST CENTER |
| 3-6 AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107, JAPAN |
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Correspondence name and address
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WOOD, HERRON & EVANS, L.L.P.
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JOSEPH R. JORDAN
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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