Patent Assignment Details
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| Reel/Frame: | 014091/0914 | |
| Pages: | 2 |
| | Recorded: | 01/23/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/10/2005
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Application #:
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10333683
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Filing Dt:
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01/23/2003
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Publication #:
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Pub Dt:
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08/28/2003
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Title:
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LOW-DIELECTRIC SILICON NITRIDE FILM AND METHOD OF FORMING THE SAME, SEMICONDUCTOR DEVICE AND FABRICATION PROCESS THEREOF
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Assignee
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| 3-6, AKASAKA, 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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Correspondence name and address
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CROWELL & MORING, L.L.P.
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FERBERT I. CANTOR
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P.O. BOX 14300
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WASHINGTON, D.C. 20044-4300
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