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Patent Assignment Details
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Reel/Frame:014228/0947   Pages: 2
Recorded: 06/30/2003
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
12/06/2005
Application #:
10377823
Filing Dt:
03/04/2003
Publication #:
Pub Dt:
09/09/2004
Title:
SEMICONDUCTOR FABRICATING APPARATUS WITH FUNCTION OF DETERMINING ETCHING PROCESSING STATE
Assignors
1
Exec Dt:
02/26/2003
2
Exec Dt:
02/25/2003
3
Exec Dt:
02/25/2003
4
Exec Dt:
03/03/2003
Assignee
1
24-14, NISHI SHINBASHI 1-CHOME, MINATO-KU
TOKYO, JAPAN
Correspondence name and address
ANTONELLI TERRY STOUT ET.AL.
1300 NORTH SEVENTEENTH STREET
SUITE 1800
ARLINGTON, VA 22209

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