Patent Assignment Details
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| Reel/Frame: | 014276/0442 | |
| Pages: | 3 |
| | Recorded: | 07/21/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/15/2005
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Application #:
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10394047
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Filing Dt:
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03/24/2003
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Publication #:
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Pub Dt:
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11/20/2003
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Title:
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MONITORING METHOD, EXPOSURE METHOD, A MANUFACTURING METHOD FOR A SEMICONDUCTOR DEVICE, INCLUDING AN ETCHING METHOD AND EXPOSURE PROCESSING UNIT
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Assignee
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| 1-1 SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN HENDERSON FARABOW ET.AL.
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ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, D.C. 20005-3315
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