Patent Assignment Details
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| Reel/Frame: | 014579/0374 | |
| Pages: | 3 |
| | Recorded: | 09/09/2003 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10416568
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Filing Dt:
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09/09/2003
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Publication #:
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Pub Dt:
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02/26/2004
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Title:
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Plasma processing apparatus and method for asssembling the plasma processing apparatus
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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SMITH, GAMBRELL & RUSSELL
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MICHAEL A. MAKUCH
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1850 M STREET, N.W.
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STE. 800
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WASHINGTON, DC 20036
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