Patent Assignment Details
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| Reel/Frame: | 015200/0875 | |
| Pages: | 15 |
| | Recorded: | 04/12/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/12/2005
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Application #:
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10672435
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Filing Dt:
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09/26/2003
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Publication #:
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Pub Dt:
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04/01/2004
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Title:
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ELECTRON BEAM EXPOSURE APPARATUS, ELECTRON BEAM EXPOSURE APPARATUS CALIBRATION METHOD, AND SEMICONDUCTOR ELEMENT MANUFACTURING METHOD
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Assignees
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| 1-32, ASHAHI-CHO 1-CHOME, NERIMA-KU |
| TOKYO, JAPAN |
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| 30-2, 3-CHOME, SHIMOMARUKO, OHTA-KU |
| TOKYO, JAPAN |
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| 6, KANDA SURUGADAI 4-CHOME, CHIYODA-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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MURAMATSU & ASSOCIATES
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YASUO MURAMATSU
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7700 IRVINE CENTER DRIVE
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SUITE 225
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IRVINE, CA 92618
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