Total properties:
11
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Patent #:
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Issue Dt:
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04/24/1990
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Application #:
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06864282
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Filing Dt:
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05/16/1986
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Title:
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FLOATING SUBCARRIERS FOR WAFER POLISHING APPARATUS
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Patent #:
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Issue Dt:
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04/27/1993
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Application #:
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07811568
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Filing Dt:
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12/20/1991
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Title:
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WAFER POLISHER HEAD HAVING FLOATING RETAINER RING
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Patent #:
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Issue Dt:
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08/22/1995
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Application #:
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08119972
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Filing Dt:
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09/09/1993
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Title:
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ROTARY UNION FOR COUUPLING FLUIDS IN A WAFER POLISHING APPARATUS
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Patent #:
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Issue Dt:
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06/18/1996
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Application #:
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08449556
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Filing Dt:
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05/24/1995
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Title:
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WAFER POLISHER HEAD ADAPTED FOR EASY REMOVAL OF WAFERS
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Patent #:
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Issue Dt:
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05/15/2001
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Application #:
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09261112
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Filing Dt:
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03/03/1999
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Title:
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CHEMICAL MECHANICAL POLISHING HEAD ASSEMBLY HAVING FLOATING WAFER CARRIER AND RETAINING RING
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Patent #:
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Issue Dt:
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10/30/2001
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Application #:
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09294547
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Filing Dt:
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04/19/1999
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Title:
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CHEMICAL MECHANICAL POLISHING HEAD HAVING FLOATING WAFER RETAINING RING AND WAFER CARRIER WITH MULTI-ZONE POLISHING PRESSURE CONTROL
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Patent #:
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Issue Dt:
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05/30/2000
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Application #:
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09363980
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Filing Dt:
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07/28/1999
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Title:
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STRUCTURE AND METHOD FOR THREE CHAMBER CMP POLISHING HEAD
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Patent #:
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Issue Dt:
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04/09/2002
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Application #:
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09390142
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Filing Dt:
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09/03/1999
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Title:
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APPARATUS AND METHOD FOR CHEMICAL-MECHANICAL POLISHING (CMP) HEAD HAVING DIRECT PNEUMATIC WAFER POLISHING PRESSURE
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Patent #:
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Issue Dt:
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09/25/2001
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Application #:
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09391073
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Filing Dt:
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09/04/1999
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Title:
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SYSTEM AND METHOD FOR END-POINT DETECTION IN A MULTI-HEAD CMP TOOL USING REAL-TIME MONITORING OF MOTOR CURRENT
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10021372
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Filing Dt:
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10/30/2001
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Publication #:
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Pub Dt:
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11/21/2002
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Title:
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Chemical mechanical polishing head assembly having floating wafer carrier and retaining ring
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10027935
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Filing Dt:
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12/21/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Title:
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APPARATUS FOR CHEMICAL-MECHANICAL POLISHING (CMP) HEAD HAVING DIRECT PNEUMATIC WAFER POLISHING PRESSURE
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