Patent Assignment Details
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| Reel/Frame: | 015795/0071 | |
| Pages: | 3 |
| | Recorded: | 09/17/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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06/17/2008
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Application #:
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10849307
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Filing Dt:
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05/20/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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METHOD AND APPARATUS FOR DECIDING CAUSE OF ABNORMALITY IN PLASMA PROCESSING APPARATUS
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Assignee
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-8481 |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT
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& DUNNER, LLP
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ERNEST F. CHAPMAN
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1300 I STREET, N.W.
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WASHINGTON, D.C. 20005-3315
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