Patent Assignment Details
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| Reel/Frame: | 015932/0063 | |
| Pages: | 3 |
| | Recorded: | 10/25/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10971675
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Filing Dt:
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10/25/2004
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Publication #:
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Pub Dt:
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04/27/2006
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Title:
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Dynamic illumination uniformity and shape control for lithography
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Assignee
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| 1399 SHOREWAY ROAD |
| BELMONT, CALIFORNIA 94002 |
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Correspondence name and address
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MCGUIREWOODS, LLP
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ANDREW M. CALDERON, ESQ.
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1750 TYSONS BOULEVARD, SUITE 1800
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MCLEAN, VA 22102
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