Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 016102/0483 | |
| Pages: | 7 |
| | Recorded: | 12/27/2004 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10932006
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Filing Dt:
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09/02/2004
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Publication #:
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Pub Dt:
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04/21/2005
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Title:
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Wafer cleaning method and equipment
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Assignees
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| 1-1 SHIBAURA 1-CHOME |
| MINATO-KU, TOKYO 105-8001, JAPAN |
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| 1-1 TENJINKITAMACHI, TERANOUCHI-AGARU, 4-CHOME |
| HORIKAWA-DORI, KAMIKYO-KU, KYOTO, JAPAN |
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| 4-1, NISHISHINJUKU 2-CHOME |
| SHINJUKU-KU, TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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LLP
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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