Patent Assignment Details
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Reel/Frame: | 016724/0521 | |
| Pages: | 4 |
| | Recorded: | 02/01/2005 | | |
Attorney Dkt #: | 07553.0044 |
Conveyance: | CORRECTIVE ASSIGNMENT TO CORRECT THE SERIAL 10/644754, PREVIOUSLY RECORDED ON REEL 014823 FRAME 0554. |
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Total properties:
1
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Patent #:
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Issue Dt:
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05/15/2007
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Application #:
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10644745
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Filing Dt:
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08/21/2003
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Publication #:
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Pub Dt:
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12/15/2005
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Title:
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PLASMA LEAK MONITORING METHOD, PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
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Assignee
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3-6, AKASAKA 5-CHOME, MINATO-KU |
TOKYO 107-8481, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW, GARRETT &
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LLP
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20005-3315
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