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Patent Assignment Details

NOTE:Results display only for issued patents and published applications. For pending or abandoned applications please consult USPTO staff.

Reel/Frame:	016851/0953			Pages:	4
		Recorded:	10/07/2005
Conveyance:	ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).

Total properties: 44

Patent #:	5996415	Issue Dt:	12/07/1999	Application #:	08847144	Filing Dt:	04/30/1997
Title:	IMPROVED APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING

Patent #:	6112595	Issue Dt:	09/05/2000	Application #:	09420217	Filing Dt:	10/18/1999
Title:	APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING

Patent #:	6690473	Issue Dt:	02/10/2004	Application #:	09495821	Filing Dt:	02/01/2000
Title:	INTEGRATED SURFACE METROLOGY

Patent #:	7042580	Issue Dt:	05/09/2006	Application #:	09533613	Filing Dt:	03/22/2000
Title:	APPARATUS FOR IMAGING METROLOGY

Patent #:	6563586	Issue Dt:	05/13/2003	Application #:	09613176	Filing Dt:	07/10/2000
Title:	WAFER METROLOGY APPARATUS AND METHOD

Patent #:	6340602	Issue Dt:	01/22/2002	Application #:	09735286	Filing Dt:	12/11/2000
Title:	Method of measuring meso-scale structures on wafers

Patent #:	6510395	Issue Dt:	01/21/2003	Application #:	09800306	Filing Dt:	03/01/2001
Publication #:	US20020022936	Pub Dt:	02/21/2002
Title:	METHOD OF DETECTING RESIDUE ON A POLISHED WAFER

Patent #:	NONE	Issue Dt:		Application #:	09927102	Filing Dt:	08/10/2001
Publication #:	US20020018217	Pub Dt:	02/14/2002
Title:	Optical critical dimension metrology system integrated into semiconductor wafer process tool

Patent #:	6572456	Issue Dt:	06/03/2003	Application #:	09927142	Filing Dt:	08/10/2001
Publication #:	US20020065028	Pub Dt:	05/30/2002
Title:	BATHLESS WAFER MEASUREMENT APPARATUS AND METHOD

Patent #:	6768967	Issue Dt:	07/27/2004	Application #:	09927177	Filing Dt:	08/10/2001
Publication #:	US20020038196	Pub Dt:	03/28/2002
Title:	DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES

Patent #:	6667805	Issue Dt:	12/23/2003	Application #:	09932548	Filing Dt:	08/17/2001
Publication #:	US20020021441	Pub Dt:	02/21/2002
Title:	SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION

Patent #:	6677602	Issue Dt:	01/13/2004	Application #:	09932786	Filing Dt:	08/17/2001
Title:	NOTCH AND FLAT SENSOR FOR WAFER ALIGNMENT

Patent #:	6850333	Issue Dt:	02/01/2005	Application #:	09938415	Filing Dt:	08/23/2001
Title:	OPTIMIZED APERTURE SHAPE FOR OPTICAL CD/PROFILE METROLOGY

Patent #:	6753961	Issue Dt:	06/22/2004	Application #:	09956356	Filing Dt:	09/18/2001
Title:	SPECTROSCOPIC ELLIPSOMETER WITHOUT ROTATING COMPONENTS

Patent #:	6623991	Issue Dt:	09/23/2003	Application #:	09999410	Filing Dt:	10/31/2001
Publication #:	US20020090743	Pub Dt:	07/11/2002
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Patent #:	6798512	Issue Dt:	09/28/2004	Application #:	10042592	Filing Dt:	01/09/2002
Publication #:	US20030030806	Pub Dt:	02/13/2003
Title:	MULTIPLE BEAM ELLIPSOMETER

Patent #:	6819426	Issue Dt:	11/16/2004	Application #:	10074561	Filing Dt:	02/12/2002
Publication #:	US20020158193	Pub Dt:	10/31/2002
Title:	OVERLAY ALIGNMENT METROLOGY USING DIFFRACTION GRATINGS

Patent #:	7099081	Issue Dt:	08/29/2006	Application #:	10081078	Filing Dt:	02/21/2002
Publication #:	US20020126277	Pub Dt:	09/12/2002
Title:	SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION AND MULTIPLE-ELEMENT DEPOLARIZER THEREFOR

Patent #:	6778273	Issue Dt:	08/17/2004	Application #:	10112138	Filing Dt:	03/29/2002
Publication #:	US20030020912	Pub Dt:	01/30/2003
Title:	POLARIMETRIC SCATTEROMETER FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES

Patent #:	6999164	Issue Dt:	02/14/2006	Application #:	10132538	Filing Dt:	04/24/2002
Publication #:	US20020176074	Pub Dt:	11/28/2002
Title:	MEASUREMENT SYSTEM CLUSTER

Patent #:	7089075	Issue Dt:	08/08/2006	Application #:	10132553	Filing Dt:	04/24/2002
Publication #:	US20020165636	Pub Dt:	11/07/2002
Title:	SYSTEMS AND METHODS FOR METROLOGY RECIPE AND MODEL GENERATION

Patent #:	6738136	Issue Dt:	05/18/2004	Application #:	10290730	Filing Dt:	11/07/2002
Publication #:	US20030090655	Pub Dt:	05/15/2003
Title:	ACCURATE SMALL-SPOT SPECTROMETRY INSTRUMENT

Patent #:	7095496	Issue Dt:	08/22/2006	Application #:	10317898	Filing Dt:	12/12/2002
Publication #:	US20030147070	Pub Dt:	08/07/2003
Title:	METHOD AND APPARATUS FOR POSITION-DEPENDENT OPTICAL METROLOGY CALIBRATION

Patent #:	6985232	Issue Dt:	01/10/2006	Application #:	10387772	Filing Dt:	03/13/2003
Publication #:	US20040179202	Pub Dt:	09/16/2004
Title:	SCATTEROMETRY BY PHASE SENSITIVE REFLECTOMETER

Patent #:	6919958	Issue Dt:	07/19/2005	Application #:	10397917	Filing Dt:	03/26/2003
Publication #:	US20030184742	Pub Dt:	10/02/2003
Title:	WAFER METROLOGY APPARATUS AND METHOD

Patent #:	6947135	Issue Dt:	09/20/2005	Application #:	10611298	Filing Dt:	07/01/2003
Publication #:	US20040032582	Pub Dt:	02/19/2004
Title:	REDUCED MULTICUBIC DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES

Patent #:	7170604	Issue Dt:	01/30/2007	Application #:	10613378	Filing Dt:	07/03/2003
Publication #:	US20050122516	Pub Dt:	06/09/2005
Title:	OVERLAY METROLOGY METHOD AND APPARATUS USING MORE THAN ONE GRATING PER MEASUREMENT DIRECTION

Patent #:	6806105	Issue Dt:	10/19/2004	Application #:	10621218	Filing Dt:	07/16/2003
Publication #:	US20040018653	Pub Dt:	01/29/2004
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Patent #:	NONE	Issue Dt:		Application #:	10639661	Filing Dt:	08/12/2003
Publication #:	US20040066517	Pub Dt:	04/08/2004
Title:	Interferometry-based method and apparatus for overlay metrology

Patent #:	6829054	Issue Dt:	12/07/2004	Application #:	10654073	Filing Dt:	09/03/2003
Publication #:	US20040080757	Pub Dt:	04/29/2004
Title:	INTEGRATED SURFACE METROLOGY

Patent #:	7193715	Issue Dt:	03/20/2007	Application #:	10714460	Filing Dt:	11/14/2003
Publication #:	US20040137651	Pub Dt:	07/15/2004
Title:	MEASUREMENT OF OVERLAY USING DIFFRACTION GRATINGS WHEN OVERLAY EXCEEDS THE GRATING PERIOD

Patent #:	6950780	Issue Dt:	09/27/2005	Application #:	10777353	Filing Dt:	02/12/2004
Publication #:	US20040167722	Pub Dt:	08/26/2004
Title:	DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES

Patent #:	6870617	Issue Dt:	03/22/2005	Application #:	10796322	Filing Dt:	03/09/2004
Publication #:	US20040174524	Pub Dt:	09/09/2004
Title:	ACCURATE SMALL-SPOT SPECTROMETRY SYSTEMS AND METHODS

Patent #:	7085676	Issue Dt:	08/01/2006	Application #:	10801023	Filing Dt:	03/15/2004
Publication #:	US20040267490	Pub Dt:	12/30/2004
Title:	FEED FORWARD CRITICAL DIMENSION CONTROL

Patent #:	6909507	Issue Dt:	06/21/2005	Application #:	10857223	Filing Dt:	05/28/2004
Publication #:	US20040218179	Pub Dt:	11/04/2004
Title:	POLARIMETRIC SCATTEROMETRY METHODS FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES

Patent #:	7230703	Issue Dt:	06/12/2007	Application #:	10858587	Filing Dt:	06/02/2004
Publication #:	US20050012928	Pub Dt:	01/20/2005
Title:	APPARATUS AND METHOD FOR MEASURING OVERLAY BY DIFFRACTION GRATINGS

Patent #:	7230704	Issue Dt:	06/12/2007	Application #:	10858691	Filing Dt:	06/02/2004
Publication #:	US20040246482	Pub Dt:	12/09/2004
Title:	DIFFRACTING, APERIODIC TARGETS FOR OVERLAY METROLOGY AND METHOD TO DETECT GROSS OVERLAY

Patent #:	6985228	Issue Dt:	01/10/2006	Application #:	10893449	Filing Dt:	07/16/2004
Publication #:	US20050002033	Pub Dt:	01/06/2005
Title:	MULTIPLE BEAM ELLIPSOMETER

Patent #:	7042569	Issue Dt:	05/09/2006	Application #:	10917219	Filing Dt:	08/12/2004
Publication #:	US20050018190	Pub Dt:	01/27/2005
Title:	OVERLAY ALIGNMENT METROLOGY USING DIFFRACTION GRATINGS

Patent #:	7049633	Issue Dt:	05/23/2006	Application #:	10919718	Filing Dt:	08/17/2004
Publication #:	US20050057755	Pub Dt:	03/17/2005
Title:	METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS

Patent #:	7145654	Issue Dt:	12/05/2006	Application #:	10957249	Filing Dt:	10/01/2004
Publication #:	US20050073684	Pub Dt:	04/07/2005
Title:	METHOD AND APPARATUS TO REDUCE SPOTSIZE IN AN OPTICAL METROLOGY INSTRUMENT

Patent #:	7106433	Issue Dt:	09/12/2006	Application #:	11012940	Filing Dt:	12/15/2004
Publication #:	US20050094138	Pub Dt:	05/05/2005
Title:	MEASUREMENT SYSTEM CLUSTER

Patent #:	7177019	Issue Dt:	02/13/2007	Application #:	11048552	Filing Dt:	02/01/2005
Publication #:	US20050128490	Pub Dt:	06/16/2005
Title:	APPARATUS FOR IMAGING METROLOGY

Patent #:	7289219	Issue Dt:	10/30/2007	Application #:	11105099	Filing Dt:	04/13/2005
Publication #:	US20050174575	Pub Dt:	08/11/2005
Title:	POLARIMETRIC SCATTEROMETRY METHODS FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES

Assignor

THERMA-WAVE, INC.

Exec Dt:

09/27/2005

Assignee

TOKYO ELECTRON LIMITED

TBS BROADCAST CENTER

3-6 AKASAKA 5-CHOME MINATO-KU

TOKYO, JAPAN 107-8481

Correspondence name and address
	STALLMAN & POLLOCK LLP
	ATTN: MICHAEL A. STALLMAN
	353 SACRAMENTO STREET
	SUITE 2200
	SAN FRANCISCO, CA 94111

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