Patent Assignment Details
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Reel/Frame: | 016860/0305 | |
| Pages: | 2 |
| | Recorded: | 08/03/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11196557
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Filing Dt:
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08/03/2005
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Publication #:
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Pub Dt:
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02/08/2007
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Title:
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Segmented biased peripheral electrode in plasma processing method and apparatus
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Assignee
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3-6 AKASAKA 5-CHOME, MINATO-KU |
TBS BROADCAST CENTER |
TOKYO 107, JAPAN |
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Correspondence name and address
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JOSEPH R. JORDAN, ESQ.
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WOOD, HERRON & EVAND, L.L.P.
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2700 CAREW TOWER
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CINCINNATI, OHIO 45202
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05/13/2024 04:46 AM
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