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Patent Assignment Details
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Reel/Frame:016959/0868   Pages: 4
Recorded: 10/31/2005
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
04/29/2008
Application #:
11201266
Filing Dt:
08/10/2005
Publication #:
Pub Dt:
02/16/2006
Title:
ETCHING METHOD, A METHOD OF FORMING A TRENCH ISOLATION STRUCTURE, A SEMICONDUCTOR SUBSTRATE AND A SEMICONDUCTOR APPARATUS
Assignors
1
Exec Dt:
10/07/2005
2
Exec Dt:
10/04/2005
3
Exec Dt:
10/24/2005
Assignees
1
4-1 NISHI-SHINJUKU 2-CHOME
SHINJUKU-KU, TOKYO, JAPAN 163-0811
2
1-1, SHIBAURA, 1-CHOME MINATO-KU
TOKYO, JAPAN
Correspondence name and address
G. GREGORY SCHIVLEY
HARNESS, DICKEY & PIERCE, P.L.C.
P.O. BOX 828
BLOOMFIELD HILLS, MICHIGAN 48303

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