Patent Assignment Details
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| Reel/Frame: | 017080/0160 | |
| Pages: | 3 |
| | Recorded: | 10/05/2005 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/06/2010
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Application #:
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11244684
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Filing Dt:
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10/05/2005
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Publication #:
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Pub Dt:
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04/13/2006
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Title:
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COMPUTER READABLE STORAGE MEDIUM FOR CONTROLLING SUBSTRATE PROCESSING APPARATUS
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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DAVID L. FEHRMAN
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MORRISON & FOERSTER LLP
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555 WEST FIFTH STREET
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LOS ANGELES, CA 90013-1024
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