Total properties:
45
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Patent #:
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Issue Dt:
|
12/07/1999
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Application #:
|
08847144
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Filing Dt:
|
04/30/1997
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Title:
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IMPROVED APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING
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Patent #:
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|
Issue Dt:
|
09/05/2000
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Application #:
|
09420217
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Filing Dt:
|
10/18/1999
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Title:
|
APPARATUS AND METHOD FOR CHARACTERIZING SEMICONDUCTOR WAFERS DURING PROCESSING
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Patent #:
|
|
Issue Dt:
|
02/10/2004
|
Application #:
|
09495821
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Filing Dt:
|
02/01/2000
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Title:
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INTEGRATED SURFACE METROLOGY
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|
Patent #:
|
|
Issue Dt:
|
05/09/2006
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Application #:
|
09533613
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Filing Dt:
|
03/22/2000
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Title:
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APPARATUS FOR IMAGING METROLOGY
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Patent #:
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Issue Dt:
|
05/13/2003
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Application #:
|
09613176
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Filing Dt:
|
07/10/2000
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Title:
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WAFER METROLOGY APPARATUS AND METHOD
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|
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Patent #:
|
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Issue Dt:
|
01/22/2002
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Application #:
|
09735286
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Filing Dt:
|
12/11/2000
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Title:
|
Method of measuring meso-scale structures on wafers
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Patent #:
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Issue Dt:
|
01/21/2003
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Application #:
|
09800306
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Filing Dt:
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03/01/2001
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Publication #:
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Pub Dt:
|
02/21/2002
| | | | |
Title:
|
METHOD OF DETECTING RESIDUE ON A POLISHED WAFER
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|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
09927102
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Filing Dt:
|
08/10/2001
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Publication #:
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Pub Dt:
|
02/14/2002
| | | | |
Title:
|
Optical critical dimension metrology system integrated into semiconductor wafer process tool
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|
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Patent #:
|
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Issue Dt:
|
06/03/2003
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Application #:
|
09927142
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Filing Dt:
|
08/10/2001
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Publication #:
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Pub Dt:
|
05/30/2002
| | | | |
Title:
|
BATHLESS WAFER MEASUREMENT APPARATUS AND METHOD
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|
|
Patent #:
|
|
Issue Dt:
|
07/27/2004
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Application #:
|
09927177
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Filing Dt:
|
08/10/2001
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Publication #:
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|
Pub Dt:
|
03/28/2002
| | | | |
Title:
|
DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES
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|
|
Patent #:
|
|
Issue Dt:
|
12/23/2003
|
Application #:
|
09932548
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Filing Dt:
|
08/17/2001
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Publication #:
|
|
Pub Dt:
|
02/21/2002
| | | | |
Title:
|
SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION
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|
|
Patent #:
|
|
Issue Dt:
|
01/13/2004
|
Application #:
|
09932786
|
Filing Dt:
|
08/17/2001
|
Title:
|
NOTCH AND FLAT SENSOR FOR WAFER ALIGNMENT
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|
|
Patent #:
|
|
Issue Dt:
|
02/01/2005
|
Application #:
|
09938415
|
Filing Dt:
|
08/23/2001
|
Title:
|
OPTIMIZED APERTURE SHAPE FOR OPTICAL CD/PROFILE METROLOGY
|
|
|
Patent #:
|
|
Issue Dt:
|
06/22/2004
|
Application #:
|
09956356
|
Filing Dt:
|
09/18/2001
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Title:
|
SPECTROSCOPIC ELLIPSOMETER WITHOUT ROTATING COMPONENTS
|
|
|
Patent #:
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|
Issue Dt:
|
09/23/2003
|
Application #:
|
09999410
|
Filing Dt:
|
10/31/2001
|
Publication #:
|
|
Pub Dt:
|
07/11/2002
| | | | |
Title:
|
METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
09/28/2004
|
Application #:
|
10042592
|
Filing Dt:
|
01/09/2002
|
Publication #:
|
|
Pub Dt:
|
02/13/2003
| | | | |
Title:
|
MULTIPLE BEAM ELLIPSOMETER
|
|
|
Patent #:
|
|
Issue Dt:
|
11/16/2004
|
Application #:
|
10074561
|
Filing Dt:
|
02/12/2002
|
Publication #:
|
|
Pub Dt:
|
10/31/2002
| | | | |
Title:
|
OVERLAY ALIGNMENT METROLOGY USING DIFFRACTION GRATINGS
|
|
|
Patent #:
|
|
Issue Dt:
|
08/29/2006
|
Application #:
|
10081078
|
Filing Dt:
|
02/21/2002
|
Publication #:
|
|
Pub Dt:
|
09/12/2002
| | | | |
Title:
|
SMALL-SPOT SPECTROMETRY INSTRUMENT WITH REDUCED POLARIZATION AND MULTIPLE-ELEMENT DEPOLARIZER THEREFOR
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|
|
Patent #:
|
|
Issue Dt:
|
08/17/2004
|
Application #:
|
10112138
|
Filing Dt:
|
03/29/2002
|
Publication #:
|
|
Pub Dt:
|
01/30/2003
| | | | |
Title:
|
POLARIMETRIC SCATTEROMETER FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES
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|
Patent #:
|
|
Issue Dt:
|
02/14/2006
|
Application #:
|
10132538
|
Filing Dt:
|
04/24/2002
|
Publication #:
|
|
Pub Dt:
|
11/28/2002
| | | | |
Title:
|
MEASUREMENT SYSTEM CLUSTER
|
|
|
Patent #:
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|
Issue Dt:
|
08/08/2006
|
Application #:
|
10132553
|
Filing Dt:
|
04/24/2002
|
Publication #:
|
|
Pub Dt:
|
11/07/2002
| | | | |
Title:
|
SYSTEMS AND METHODS FOR METROLOGY RECIPE AND MODEL GENERATION
|
|
|
Patent #:
|
|
Issue Dt:
|
05/18/2004
|
Application #:
|
10290730
|
Filing Dt:
|
11/07/2002
|
Publication #:
|
|
Pub Dt:
|
05/15/2003
| | | | |
Title:
|
ACCURATE SMALL-SPOT SPECTROMETRY INSTRUMENT
|
|
|
Patent #:
|
|
Issue Dt:
|
08/22/2006
|
Application #:
|
10317898
|
Filing Dt:
|
12/12/2002
|
Publication #:
|
|
Pub Dt:
|
08/07/2003
| | | | |
Title:
|
METHOD AND APPARATUS FOR POSITION-DEPENDENT OPTICAL METROLOGY CALIBRATION
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|
|
Patent #:
|
|
Issue Dt:
|
01/10/2006
|
Application #:
|
10387772
|
Filing Dt:
|
03/13/2003
|
Publication #:
|
|
Pub Dt:
|
09/16/2004
| | | | |
Title:
|
SCATTEROMETRY BY PHASE SENSITIVE REFLECTOMETER
|
|
|
Patent #:
|
|
Issue Dt:
|
07/19/2005
|
Application #:
|
10397917
|
Filing Dt:
|
03/26/2003
|
Publication #:
|
|
Pub Dt:
|
10/02/2003
| | | | |
Title:
|
WAFER METROLOGY APPARATUS AND METHOD
|
|
|
Patent #:
|
|
Issue Dt:
|
09/20/2005
|
Application #:
|
10611298
|
Filing Dt:
|
07/01/2003
|
Publication #:
|
|
Pub Dt:
|
02/19/2004
| | | | |
Title:
|
REDUCED MULTICUBIC DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES
|
|
|
Patent #:
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|
Issue Dt:
|
01/30/2007
|
Application #:
|
10613378
|
Filing Dt:
|
07/03/2003
|
Publication #:
|
|
Pub Dt:
|
06/09/2005
| | | | |
Title:
|
OVERLAY METROLOGY METHOD AND APPARATUS USING MORE THAN ONE GRATING PER MEASUREMENT DIRECTION
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|
|
Patent #:
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|
Issue Dt:
|
10/19/2004
|
Application #:
|
10621218
|
Filing Dt:
|
07/16/2003
|
Publication #:
|
|
Pub Dt:
|
01/29/2004
| | | | |
Title:
|
METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10639661
|
Filing Dt:
|
08/12/2003
|
Publication #:
|
|
Pub Dt:
|
04/08/2004
| | | | |
Title:
|
Interferometry-based method and apparatus for overlay metrology
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|
|
Patent #:
|
|
Issue Dt:
|
12/07/2004
|
Application #:
|
10654073
|
Filing Dt:
|
09/03/2003
|
Publication #:
|
|
Pub Dt:
|
04/29/2004
| | | | |
Title:
|
INTEGRATED SURFACE METROLOGY
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|
|
Patent #:
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|
Issue Dt:
|
03/20/2007
|
Application #:
|
10714460
|
Filing Dt:
|
11/14/2003
|
Publication #:
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|
Pub Dt:
|
07/15/2004
| | | | |
Title:
|
MEASUREMENT OF OVERLAY USING DIFFRACTION GRATINGS WHEN OVERLAY EXCEEDS THE GRATING PERIOD
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|
|
Patent #:
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|
Issue Dt:
|
09/27/2005
|
Application #:
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10777353
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Filing Dt:
|
02/12/2004
|
Publication #:
|
|
Pub Dt:
|
08/26/2004
| | | | |
Title:
|
DATABASE INTERPOLATION METHOD FOR OPTICAL MEASUREMENT OF DIFFRACTIVE MICROSTRUCTURES
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|
|
Patent #:
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|
Issue Dt:
|
03/22/2005
|
Application #:
|
10796322
|
Filing Dt:
|
03/09/2004
|
Publication #:
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|
Pub Dt:
|
09/09/2004
| | | | |
Title:
|
ACCURATE SMALL-SPOT SPECTROMETRY SYSTEMS AND METHODS
|
|
|
Patent #:
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Issue Dt:
|
08/01/2006
|
Application #:
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10801023
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Filing Dt:
|
03/15/2004
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Publication #:
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|
Pub Dt:
|
12/30/2004
| | | | |
Title:
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FEED FORWARD CRITICAL DIMENSION CONTROL
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|
Patent #:
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Issue Dt:
|
06/21/2005
|
Application #:
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10857223
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Filing Dt:
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05/28/2004
|
Publication #:
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|
Pub Dt:
|
11/04/2004
| | | | |
Title:
|
POLARIMETRIC SCATTEROMETRY METHODS FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES
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|
Patent #:
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|
Issue Dt:
|
06/12/2007
|
Application #:
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10858587
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Filing Dt:
|
06/02/2004
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Publication #:
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|
Pub Dt:
|
01/20/2005
| | | | |
Title:
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APPARATUS AND METHOD FOR MEASURING OVERLAY BY DIFFRACTION GRATINGS
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Patent #:
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Issue Dt:
|
06/12/2007
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Application #:
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10858691
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Filing Dt:
|
06/02/2004
|
Publication #:
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|
Pub Dt:
|
12/09/2004
| | | | |
Title:
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DIFFRACTING, APERIODIC TARGETS FOR OVERLAY METROLOGY AND METHOD TO DETECT GROSS OVERLAY
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Patent #:
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Issue Dt:
|
01/10/2006
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Application #:
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10893449
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Filing Dt:
|
07/16/2004
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Publication #:
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Pub Dt:
|
01/06/2005
| | | | |
Title:
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MULTIPLE BEAM ELLIPSOMETER
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Patent #:
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|
Issue Dt:
|
05/09/2006
|
Application #:
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10917219
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Filing Dt:
|
08/12/2004
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Publication #:
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|
Pub Dt:
|
01/27/2005
| | | | |
Title:
|
OVERLAY ALIGNMENT METROLOGY USING DIFFRACTION GRATINGS
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|
|
Patent #:
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|
Issue Dt:
|
05/23/2006
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Application #:
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10919718
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Filing Dt:
|
08/17/2004
|
Publication #:
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|
Pub Dt:
|
03/17/2005
| | | | |
Title:
|
METHOD OF MEASURING MESO-SCALE STRUCTURES ON WAFERS
|
|
|
Patent #:
|
|
Issue Dt:
|
12/05/2006
|
Application #:
|
10957249
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Filing Dt:
|
10/01/2004
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Publication #:
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|
Pub Dt:
|
04/07/2005
| | | | |
Title:
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METHOD AND APPARATUS TO REDUCE SPOTSIZE IN AN OPTICAL METROLOGY INSTRUMENT
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Patent #:
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Issue Dt:
|
09/12/2006
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Application #:
|
11012940
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Filing Dt:
|
12/15/2004
|
Publication #:
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|
Pub Dt:
|
05/05/2005
| | | | |
Title:
|
MEASUREMENT SYSTEM CLUSTER
|
|
|
Patent #:
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|
Issue Dt:
|
02/13/2007
|
Application #:
|
11048552
|
Filing Dt:
|
02/01/2005
|
Publication #:
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|
Pub Dt:
|
06/16/2005
| | | | |
Title:
|
APPARATUS FOR IMAGING METROLOGY
|
|
|
Patent #:
|
|
Issue Dt:
|
10/30/2007
|
Application #:
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11105099
|
Filing Dt:
|
04/13/2005
|
Publication #:
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|
Pub Dt:
|
08/11/2005
| | | | |
Title:
|
POLARIMETRIC SCATTEROMETRY METHODS FOR CRITICAL DIMENSION MEASUREMENTS OF PERIODIC STRUCTURES
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|
|
Patent #:
|
|
Issue Dt:
|
08/08/2006
|
Application #:
|
11256764
|
Filing Dt:
|
10/24/2005
|
Publication #:
|
|
Pub Dt:
|
02/16/2006
| | | | |
Title:
|
SCATTEROMETRY BY PHASE SENSITIVE REFLECTOMETER
|
|