Patent Assignment Details
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Reel/Frame: | 017245/0123 | |
| Pages: | 3 |
| | Recorded: | 11/18/2005 | | |
Attorney Dkt #: | 04329.3628 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11217464
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Filing Dt:
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09/02/2005
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Publication #:
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Pub Dt:
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03/09/2006
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Title:
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Liquid immersion optical tool, method for cleaning liquid immersion optical tool, and method for manufacturing semiconductor device
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Assignee
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1-1, SHIBAURA 1-CHOME, MINATO-KU |
TOKYO 105-8001, JAPAN |
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Correspondence name and address
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FINNEGAN HENDERSON FARABOW GARRETT &
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DUNNER, LLP
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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