Patent Assignment Details
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Reel/Frame: | 017245/0394 | |
| Pages: | 3 |
| | Recorded: | 11/15/2005 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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02/22/2011
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Application #:
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11280113
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Filing Dt:
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11/15/2005
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Title:
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METHOD FOR POROGEN REMOVAL AND MECHANICAL STRENGTH ENHANCEMENT OF LOW-K CARBON DOPED SILICON OXIDE USING LOW THERMAL BUDGET MICROWAVE CURING
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Assignee
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3970 NORTH FIRST STREET |
SAN JOSE, CALIFORNIA 95134 |
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Correspondence name and address
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BEYER WEAVER & THOMAS LLP
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P.O. BOX 70250
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OAKLAND, CA 94612-0250
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