Patent Assignment Details
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| Reel/Frame: | 017694/0360 | |
| Pages: | 3 |
| | Recorded: | 03/16/2006 | | |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11376163
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Filing Dt:
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03/16/2006
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Publication #:
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Pub Dt:
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09/21/2006
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Title:
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Atmospheric transfer chamber, processed object transfer method, program for performing the transfer method, and storage medium storing the program
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Assignee
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO 107-8481, JAPAN |
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Correspondence name and address
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OBLON, SPIVAK, MCCLELLAND, MAIER, ET AL
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1940 DUKE STREET
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ALEXANDRIA, VIRGINIA 22314
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