Patent Assignment Details
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| Reel/Frame: | 017989/0104 | |
| Pages: | 2 |
| | Recorded: | 06/12/2006 | | |
| Attorney Dkt #: | 03180.0449 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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11389124
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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10/05/2006
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Title:
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System for controlling a plurality of lot processes, method for controlling a plurality of lot processes and method for manufacturing a semiconductor device
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Assignee
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| 1-1, SHIBAURA 1-CHOME, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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FINNEGAN, HENDERSON, FARABOW,
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GARRETT & DUNNER, LLP
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901 NEW YORK AVENUE, NW
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WASHINGTON, DC 20001-4413
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