Patent Assignment Details
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Reel/Frame: | 018218/0343 | |
| Pages: | 3 |
| | Recorded: | 08/22/2006 | | |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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03/18/2008
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Application #:
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29260830
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Filing Dt:
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06/02/2006
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Title:
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RF ELECTRODE FOR A PROCESS TUBE OF SEMICONDUCTOR MANUFACTURING APPARATUS
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Assignee
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3-6, AKASAKA 5-CHOME |
MINATO-KU, TOKYO-TO, JAPAN |
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Correspondence name and address
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SMITH, GAMBRELL & RUSSELL
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1850 M STREET, NW
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SUITE 800
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WASHINGTON, D.C. 20036
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