Patent Assignment Details
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| Reel/Frame: | 018315/0464 | |
| Pages: | 2 |
| | Recorded: | 09/27/2006 | | |
| Attorney Dkt #: | TPS-035 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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09/16/2008
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Application #:
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11535900
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Filing Dt:
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09/27/2006
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Publication #:
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Pub Dt:
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04/10/2008
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Title:
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INLINE PHYSICAL SHAPE PROFILING FOR PREDICTIVE TEMPERATURE CORRECTION DURING BAKING OF WAFERS IN A SEMICONDUCTOR PHOTOLITHOGRAPHY PROCESS
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Assignee
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TBS BROADCAST CENTER |
| TOKYO, JAPAN 107 |
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Correspondence name and address
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KRISTI L. DAVIDSON
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441 VINE STREET
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2700 CAREW TOWER
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CINCINNATI, OH 45202
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