Patent Assignment Details
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
| Reel/Frame: | 018324/0083 | |
| Pages: | 2 |
| | Recorded: | 09/20/2006 | | |
| Attorney Dkt #: | 128337 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
|
|
Total properties:
1
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/12/2009
|
Application #:
|
11523595
|
Filing Dt:
|
09/20/2006
|
|
Publication #:
|
|
Pub Dt:
|
12/06/2007
| | | | |
|
Title:
|
IMMERSION LITHOGRAPHY SYSTEM AND METHOD HAVING AN IMMERSION FLUID CONFINEMENT PLATE FOR SUBMERGING THE SUBSTRATE TO BE IMAGED IN IMMERSION FLUID
|
|
|
Assignee
|
|
|
|
|
| 2-3 MARUNOUCHI 3-CHOME |
| CHIYODA-KU, TOKYO 100-8331, JAPAN |
|
|
Correspondence name and address
|
| |
MARIO A. COSTANTINO
|
| |
OLIFF & BERRIDGE, PLC
|
| |
P.O. BOX 19928
|
| |
ALEXANDRIA, VA 22320
|
Search Results as of:
05/17/2024 05:40 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
