Patent Assignment Details
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| Reel/Frame: | 018651/0311 | |
| Pages: | 3 |
| | Recorded: | 11/28/2006 | | |
| Attorney Dkt #: | 66042(70840) |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/27/2010
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Application #:
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11502771
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Filing Dt:
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08/11/2006
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Publication #:
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Pub Dt:
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03/22/2007
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Title:
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EXPOSURE OPERATION EVALUATION METHOD FOR EXPOSURE APPARATUS AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
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Assignee
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| 22-22 NAGAIKE-CHO |
| ABENO-KU |
| OSAKA-SHI, OSAKA, JAPAN 545-8522 |
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Correspondence name and address
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DAVID G. CONLIN
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EDWARDS ANGELL PALMER & DODGE LLP
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P.O. BOX 55874
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BOSTON, MA 02205
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