Patent Assignment Details
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Reel/Frame: | 019052/0574 | |
| Pages: | 4 |
| | Recorded: | 03/22/2007 | | |
Attorney Dkt #: | 11233 CPI/COPPER |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/15/2013
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Application #:
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11689720
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Filing Dt:
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03/22/2007
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Publication #:
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Pub Dt:
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04/10/2008
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Title:
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Sputtering Chamber Having Auxiliary Backside Magnet to Improve Etch Uniformity and Magnetron Producing Sustained Self Sputtering of Ruthenium and Tantalum
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Assignee
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3050 BOWERS AVENUE |
SANTA CLARA, CALIFORNIA 95054 |
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Correspondence name and address
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APPLIED MATERIALS, INC.
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P. O. BOX 450 A
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SANTA CLARA, CA 95052
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