Patent Assignment Details
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| Reel/Frame: | 020191/0615 | |
| Pages: | 4 |
| | Recorded: | 11/26/2007 | | |
| Attorney Dkt #: | 10393.0004-00 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/19/2011
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Application #:
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11921008
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Filing Dt:
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11/26/2007
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Publication #:
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Pub Dt:
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09/17/2009
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Title:
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METHOD FOR DETECTING POLISHING END IN CMP POLISHING DEVICE, CMP POLISHING DEVICE, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Assignee
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO, JAPAN 100-8331 |
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Correspondence name and address
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MICHAEL R. KELLY
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FINNEGAN, HENDERSON, FARABOW, ET AL
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901 NEW YORK AVENUE, N.W.
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WASHINGTON, DC 20001-4413
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