Patent Assignment Details
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For pending or abandoned applications please consult USPTO staff.
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| Reel/Frame: | 020668/0696 | |
| Pages: | 2 |
| | Recorded: | 02/29/2008 | | |
| Attorney Dkt #: | 062758-0219 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12073082
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Filing Dt:
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02/29/2008
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Publication #:
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Pub Dt:
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07/16/2009
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Title:
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Plasma processing apparatus including electrostatic chuck with built-in heater
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Assignee
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| 1-24-14, NISHI SHINBASHI, MINATO-KU |
| TOKYO, JAPAN |
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Correspondence name and address
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MCDERMOTT WILL & EMERY LLP
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600 13TH STREET N.W.
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WASHINGTON, D.C. 20005-3096
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