Total properties:
28
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Patent #:
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Issue Dt:
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09/23/2008
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Application #:
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10274252
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Filing Dt:
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10/17/2002
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Publication #:
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Pub Dt:
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04/22/2004
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Title:
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GENERATING SIMULATED DIFFRACTION SIGNALS FOR TWO-DIMENSIONAL STRUCTURES
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Patent #:
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Issue Dt:
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07/04/2006
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Application #:
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10357705
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Filing Dt:
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02/03/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Title:
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MODEL OPTIMIZATION FOR STRUCTURES WITH ADDITIONAL MATERIALS
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Patent #:
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Issue Dt:
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09/14/2004
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Application #:
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10358782
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Filing Dt:
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02/04/2003
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Publication #:
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Pub Dt:
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08/05/2004
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Title:
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ADAPTIVE CORRELATION OF PATTERN RESIST STRUCTURES USING OPTICAL METROLOGY
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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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10394327
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Filing Dt:
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03/20/2003
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Publication #:
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Pub Dt:
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09/23/2004
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Title:
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GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM
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Patent #:
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Issue Dt:
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05/16/2006
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Application #:
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10428186
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Filing Dt:
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05/02/2003
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Publication #:
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Pub Dt:
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11/04/2004
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Title:
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EDGE ROUGHNESS MEASUREMENT IN OPTICAL METROLOGY
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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10447609
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Filing Dt:
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05/28/2003
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Publication #:
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Pub Dt:
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12/02/2004
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Title:
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RESOLUTION ENHANCED OPTICAL METROLOGY
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Patent #:
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Issue Dt:
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07/01/2008
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Application #:
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10663300
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Filing Dt:
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09/15/2003
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Publication #:
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Pub Dt:
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03/17/2005
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Title:
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SELECTING A HYPOTHETICAL PROFILE TO USE IN OPTICAL METROLOGY
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Patent #:
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Issue Dt:
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05/29/2007
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Application #:
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10696246
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Filing Dt:
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10/28/2003
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Publication #:
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Pub Dt:
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04/28/2005
| | | | |
Title:
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AZIMUTHAL SCANNING OF A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER
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Patent #:
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Issue Dt:
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10/24/2006
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Application #:
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10735212
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Filing Dt:
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12/12/2003
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Publication #:
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Pub Dt:
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06/16/2005
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Title:
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PARAMETRIC OPTIMIZATION OF OPTICAL METROLOGY MODEL
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Patent #:
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Issue Dt:
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06/20/2006
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Application #:
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10888726
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Filing Dt:
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07/08/2004
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Publication #:
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Pub Dt:
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01/12/2006
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Title:
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OPTICAL METROLOGY MODEL OPTIMIZATION FOR PROCESS CONTROL
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Patent #:
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Issue Dt:
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10/21/2008
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Application #:
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10910018
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Filing Dt:
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08/02/2004
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Publication #:
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Pub Dt:
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01/13/2005
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Title:
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ADAPTIVE CORRELATION OF PATTERN RESIST STRUCTURES USING OPTICAL METROLOGY
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Patent #:
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Issue Dt:
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01/30/2007
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Application #:
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10946729
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Filing Dt:
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09/21/2004
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Publication #:
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Pub Dt:
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03/23/2006
| | | | |
Title:
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OPTICAL METROLOGY MODEL OPTIMIZATION BASED ON GOALS
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Patent #:
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|
Issue Dt:
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10/09/2007
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Application #:
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11003961
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Filing Dt:
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12/03/2004
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Publication #:
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Pub Dt:
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06/08/2006
| | | | |
Title:
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EXAMINING A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER USING MACHINE LEARNING SYSTEMS
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Patent #:
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Issue Dt:
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06/17/2008
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Application #:
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11061303
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Filing Dt:
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02/18/2005
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Publication #:
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Pub Dt:
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09/22/2005
| | | | |
Title:
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OPTICAL METROLOGY OPTIMIZATION FOR REPETITIVE STRUCTURES
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Patent #:
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Issue Dt:
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09/25/2007
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Application #:
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11061330
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Filing Dt:
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02/17/2005
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Publication #:
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Pub Dt:
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08/17/2006
| | | | |
Title:
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OPTICAL METROLOGY OF A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER USING OPTICAL PULSES
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Patent #:
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Issue Dt:
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09/02/2008
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Application #:
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11096782
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Filing Dt:
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03/31/2005
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Publication #:
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Pub Dt:
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10/05/2006
| | | | |
Title:
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SPLIT MACHINE LEARNING SYSTEMS
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Patent #:
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Issue Dt:
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04/08/2008
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Application #:
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11155406
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Filing Dt:
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06/16/2005
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Publication #:
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Pub Dt:
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12/28/2006
| | | | |
Title:
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OPTICAL METROLOGY MODEL OPTIMIZATION FOR REPETITIVE STRUCTURES
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|
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Patent #:
|
|
Issue Dt:
|
12/16/2008
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Application #:
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11349773
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Filing Dt:
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02/07/2006
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Publication #:
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Pub Dt:
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08/09/2007
| | | | |
Title:
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TRANSFORMING METROLOGY DATA FROM A SEMICONDUCTOR TREATMENT SYSTEM USING MULTIVARIATE ANALYSIS
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Patent #:
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|
Issue Dt:
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09/23/2008
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Application #:
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11388265
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Filing Dt:
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03/24/2006
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Publication #:
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Pub Dt:
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09/27/2007
| | | | |
Title:
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OPTIMIZATION OF DIFFRACTION ORDER SELECTION FOR TWO-DIMENSIONAL STRUCTURES
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Patent #:
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Issue Dt:
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11/27/2007
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Application #:
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11390798
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Filing Dt:
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03/27/2006
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Publication #:
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Pub Dt:
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09/27/2007
| | | | |
Title:
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LIBRARY ACCURACY ENHANCEMENT AND EVALUATION
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Patent #:
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|
Issue Dt:
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01/06/2009
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Application #:
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11396164
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Filing Dt:
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03/30/2006
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Publication #:
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Pub Dt:
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10/04/2007
| | | | |
Title:
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IN-DIE OPTICAL METROLOGY
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Patent #:
|
|
Issue Dt:
|
10/28/2008
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Application #:
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11408744
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Filing Dt:
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04/21/2006
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Publication #:
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Pub Dt:
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10/25/2007
| | | | |
Title:
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OPTIMIZED CHARACTERIZATION OF WAFERS STRUCTURES FOR OPTICAL METROLOGY
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Patent #:
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|
Issue Dt:
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09/18/2007
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Application #:
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11471892
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Filing Dt:
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06/20/2006
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Publication #:
|
|
Pub Dt:
|
11/02/2006
| | | | |
Title:
|
GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM
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|
|
Patent #:
|
|
Issue Dt:
|
05/22/2007
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Application #:
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11472133
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Filing Dt:
|
06/20/2006
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Publication #:
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|
Pub Dt:
|
11/02/2006
| | | | |
Title:
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OPTICAL METROLOGY MODEL OPTIMIZATION FOR PROCESS CONTROL
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|
|
Patent #:
|
|
Issue Dt:
|
07/01/2008
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Application #:
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11804998
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Filing Dt:
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05/21/2007
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Publication #:
|
|
Pub Dt:
|
09/27/2007
| | | | |
Title:
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OPTICAL METROLOGY MODEL OPTIMIZATION FOR PROCESS CONTROL
|
|
|
Patent #:
|
|
Issue Dt:
|
08/19/2008
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Application #:
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11805932
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Filing Dt:
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05/25/2007
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Publication #:
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|
Pub Dt:
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10/11/2007
| | | | |
Title:
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AZIMUTHAL SCANNING OF A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER
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Patent #:
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|
Issue Dt:
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11/11/2008
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Application #:
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11856651
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Filing Dt:
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09/17/2007
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Publication #:
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Pub Dt:
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02/14/2008
| | | | |
Title:
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GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM
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|
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Patent #:
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|
Issue Dt:
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11/18/2008
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Application #:
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11869591
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Filing Dt:
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10/09/2007
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Publication #:
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Pub Dt:
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02/07/2008
| | | | |
Title:
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EXAMINING A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER USING MACHINE LEARNING SYSTEMS
|
|