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Total properties:
15
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|
|
|
Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10290792
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Filing Dt:
|
11/08/2002
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|
Publication #:
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|
Pub Dt:
|
05/13/2004
| | | | |
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Title:
|
Diffraction order selection for optical metrology simulation
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|
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Patent #:
|
|
Issue Dt:
|
12/08/2009
|
Application #:
|
10375708
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Filing Dt:
|
02/26/2003
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Publication #:
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Pub Dt:
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08/26/2004
| | | | |
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Title:
|
APPROXIMATING EIGENSOLUTIONS FOR USE IN DETERMINING THE PROFILE OF A STRUCTURE FORMED ON A SEMICONDUCTOR WAFER
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|
|
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Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
10608300
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Filing Dt:
|
06/27/2003
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|
Publication #:
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|
Pub Dt:
|
12/30/2004
| | | | |
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Title:
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Optical metrology of structures formed on semiconductor wafer using machine learning systems
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|
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Patent #:
|
|
Issue Dt:
|
04/21/2009
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Application #:
|
10791046
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Filing Dt:
|
03/01/2004
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|
Publication #:
|
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Pub Dt:
|
09/01/2005
| | | | |
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Title:
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SELECTING A PROFILE MODEL FOR USE IN OPTICAL METROLOGY USING A MACHINE LEARINING SYSTEM
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|
|
|
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Patent #:
|
NONE
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Issue Dt:
|
|
Application #:
|
10856002
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Filing Dt:
|
05/28/2004
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|
Publication #:
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|
Pub Dt:
|
12/15/2005
| | | | |
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Title:
|
Shape roughness measurement in optical metrology
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|
|
|
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Patent #:
|
|
Issue Dt:
|
07/28/2009
|
Application #:
|
10933028
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Filing Dt:
|
09/01/2004
|
|
Publication #:
|
|
Pub Dt:
|
03/02/2006
| | | | |
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Title:
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CONTROLLING CRITICAL DIMENSIONS OF STRUCTURES FORMED ON A WAFER IN SEMICONDUCTOR PROCESSING
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/07/2009
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Application #:
|
11173198
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Filing Dt:
|
07/01/2005
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|
Publication #:
|
|
Pub Dt:
|
01/04/2007
| | | | |
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Title:
|
MODELING AND MEASURING STRUCTURES WITH SPATIALLY VARYING PROPERTIES IN OPTICAL METROLOGY
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
11218884
|
Filing Dt:
|
09/02/2005
|
|
Publication #:
|
|
Pub Dt:
|
08/24/2006
| | | | |
|
Title:
|
Selecting unit cell configuration for repeating structures in optical metrology
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|
|
|
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Patent #:
|
|
Issue Dt:
|
04/21/2009
|
Application #:
|
11371752
|
Filing Dt:
|
03/08/2006
|
|
Publication #:
|
|
Pub Dt:
|
09/13/2007
| | | | |
|
Title:
|
WEIGHTING FUNCTION TO ENHANCE MEASURED DIFFRACTION SIGNALS IN OPTICAL METROLOGY
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|
|
|
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Patent #:
|
|
Issue Dt:
|
09/15/2009
|
Application #:
|
11699837
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Filing Dt:
|
01/29/2007
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|
Publication #:
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|
Pub Dt:
|
06/14/2007
| | | | |
|
Title:
|
OPTICAL METROLOGY MODEL OPTIMIZATION BASED ON GOALS
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/11/2008
|
Application #:
|
11856651
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Filing Dt:
|
09/17/2007
|
|
Publication #:
|
|
Pub Dt:
|
02/14/2008
| | | | |
|
Title:
|
GENERIC INTERFACE FOR AN OPTICAL METROLOGY SYSTEM
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|
|
|
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Patent #:
|
|
Issue Dt:
|
11/10/2009
|
Application #:
|
11946821
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Filing Dt:
|
11/28/2007
|
|
Publication #:
|
|
Pub Dt:
|
03/20/2008
| | | | |
|
Title:
|
LIBRARY ACCURACY ENHANCMENT AND EVALUATION
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|
|
|
|
Patent #:
|
NONE
|
Issue Dt:
|
|
Application #:
|
12099735
|
Filing Dt:
|
04/08/2008
|
|
Publication #:
|
|
Pub Dt:
|
08/14/2008
| | | | |
|
Title:
|
OPTICAL METROLOGY MODEL OPTIMIZATION FOR REPETITIVE STRUCTURES
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|
|
|
|
Patent #:
|
|
Issue Dt:
|
11/10/2009
|
Application #:
|
12140627
|
Filing Dt:
|
06/17/2008
|
|
Publication #:
|
|
Pub Dt:
|
11/20/2008
| | | | |
|
Title:
|
OPTICAL METROLOGY OPTIMIZATION FOR REPETITIVE STRUCTURES
|
|
|
|
|
Patent #:
|
|
Issue Dt:
|
05/01/2012
|
Application #:
|
12336435
|
Filing Dt:
|
12/16/2008
|
|
Publication #:
|
|
Pub Dt:
|
04/09/2009
| | | | |
|
Title:
|
TRANSFORMING METROLOGY DATA FROM A SEMICONDUCTOR TREATMENT SYSTEM USING MULTIVARIATE ANALYSIS
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|
