Patent Assignment Details
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| Reel/Frame: | 022871/0409 | |
| Pages: | 3 |
| | Recorded: | 06/24/2009 | | |
| Attorney Dkt #: | TTI-089 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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07/28/2009
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Application #:
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10933028
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Filing Dt:
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09/01/2004
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Publication #:
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Pub Dt:
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03/02/2006
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Title:
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CONTROLLING CRITICAL DIMENSIONS OF STRUCTURES FORMED ON A WAFER IN SEMICONDUCTOR PROCESSING
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Assignee
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| 3-1 AKASAKA 5-CHOME MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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4350 W. CHANDLER BLVD, SUITE 10
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CHANDLER, AZ 85226
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