Patent Assignment Details
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Reel/Frame: | 023024/0155 | |
| Pages: | 5 |
| | Recorded: | 07/29/2009 | | |
Attorney Dkt #: | TTCA-315 |
Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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12/29/2009
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Application #:
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12511832
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Filing Dt:
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07/29/2009
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Title:
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LOW DAMAGE METHOD FOR ASHING A SUBSTRATE USING CO2/CO-BASED PROCESS
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Assignee
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AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME |
MINATO-KU, TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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TOKYO ELECTRON U.S. HOLDINGS, INC.
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4350 WEST CHANDLER BLVD.
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SUITE 10/11
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CHANDLER, AZ 85226
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