Patent Assignment Details
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| Reel/Frame: | 023156/0487 | |
| Pages: | 11 |
| | Recorded: | 08/27/2009 | | |
| Attorney Dkt #: | MAPS-45803 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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04/02/2013
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Application #:
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12528847
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Filing Dt:
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08/27/2009
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Publication #:
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Pub Dt:
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04/29/2010
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Title:
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FORMING METHOD OF AMORPHOUS CARBON FILM, AMORPHOUS CARBON FILM, MULTILAYER RESIST FILM, MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE, AND COMPUTER-READABLE STORAGE MEDIUM
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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PEARNE & GORDON LLP
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1801 EAST 9TH STREET, SUITE 1200
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CLEVELAND, OH 44114
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