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Patent Assignment Details
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Reel/Frame:023393/0931   Pages: 3
Recorded: 10/20/2009
Attorney Dkt #:033082 M 618
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
NONE
Issue Dt:
Application #:
12514527
Filing Dt:
05/12/2009
Publication #:
Pub Dt:
02/18/2010
Title:
METHOD FOR SUPPLYING PROCESS GAS, SYSTEM FOR SUPPLYING PROCESS GAS, AND SYSTEM FOR PROCESSING OBJECT TO BE PROCESSED
Assignor
1
Exec Dt:
09/17/2009
Assignee
1
3-1, AKASAKA 5-CHOME, MINATO-KU,
TOKYO-TO, JAPAN
Correspondence name and address
MICHAEL A. MAKUCH
1130 CONNECTICUT AVE., STE. 1130
SMITH, GAMBRELL & RUSSELL, LLP
WASHINGTON, DC 20036

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