Patent Assignment Details
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| Reel/Frame: | 025371/0925 | |
| Pages: | 3 |
| | Recorded: | 11/18/2010 | | |
| Attorney Dkt #: | 231752US |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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Issue Dt:
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10/11/2011
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Application #:
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10673467
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Filing Dt:
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09/30/2003
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Publication #:
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Pub Dt:
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03/31/2005
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Title:
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SYSTEM AND METHOD FOR USING FIRST-PRINCIPLES SIMULATION TO CONTROL A SEMICONDUCTOR MANUFACTURING PROCESS VIA A SIMULATION RESULT OR A DERIVED EMPIRICAL MODEL
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Assignee
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| 3-1, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO, JAPAN 107-6325 |
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Correspondence name and address
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OBLON, SPIVAK
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1940 DUKE STREET
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ALEXANDRIA, VA 22314
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