Patent Assignment Details
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| Reel/Frame: | 025468/0598 | |
| Pages: | 2 |
| | Recorded: | 12/08/2010 | | |
| Attorney Dkt #: | 101175 |
| Conveyance: | ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). |
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Total properties:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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12922565
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Filing Dt:
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12/08/2010
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Publication #:
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Pub Dt:
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05/05/2011
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Title:
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PLASMA PROCESSING APPARATUS AND METHOD FOR CONTROLLING SUBSTRATE ATTRACTION FORCE IN PLASMA PROCESSING APPARATUS
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Assignee
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| 16-5, KONAN 2-CHOME, MINATO-KU |
| TOKYO, JAPAN 1088215 |
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Correspondence name and address
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WESTERMAN, HATTORI, DANIELS & ADRIAN, LL
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1250 CONNECTICUT AVENUE, NW
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SUITE-700
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WASHINGTON, DC 20036-2657
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