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Reel/Frame:025823/0014   Pages: 3
Recorded: 02/16/2011
Attorney Dkt #:TTI-231
Conveyance: ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Total properties: 1
1
Patent #:
Issue Dt:
05/08/2012
Application #:
13028960
Filing Dt:
02/16/2011
Title:
ETCH STAGE MEASUREMENT SYSTEM
Assignors
1
Exec Dt:
02/11/2011
2
Exec Dt:
02/11/2011
Assignee
1
3-1 AKASAKA 5-CHOME MINATO-KU
TOKYO, JAPAN 107-6325
Correspondence name and address
TOKYO ELECTRON U.S. HOLDINGS, INC.
4350 WEST CHANDLER BLVD.
SUITE 10/11
CHANDLER, AZ 85226

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